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Process optimization of plasma nitridation SiON for 65 nm node gate dielectrics.

Yandong HeXing ZhangYangyuan Wang
Published in: Sci. China Inf. Sci. (2011)
Keyphrases
  • optimization process
  • real time
  • optimization algorithm
  • process model
  • information retrieval
  • knowledge base
  • optimization problems
  • constrained optimization