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Application of cross-sectional transmission electron microscopy to thin-film-transistor failure analysis.

Satoshi TsujiKatsuhiro TsujimotoHideo Iwama
Published in: IBM J. Res. Dev. (1998)
Keyphrases
  • cross sectional
  • thin film transistor
  • image processing
  • blood vessels
  • transmission electron microscopy
  • feature selection
  • image analysis