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A SOI-MEMS atmosphere pressure sensor and its low stress packaging.

Lidong DuMengying ZhangZhan ZhaoLiang LiCheng LiuZhen FangShaohua WuXuejin SunXiaolei Wang
Published in: NEMS (2014)
Keyphrases
  • high sensitivity
  • high speed
  • sensor networks
  • high density
  • sensor data
  • information retrieval
  • artificial intelligence
  • decision trees
  • case study
  • energy consumption
  • high levels
  • vision sensor
  • shear stress