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A high-fidelity, web-based simulator for 300 mm wafer fabs.
Hansoo Kim
Jonghun Park
SugJe Sohn
Ying Wang
Spyros A. Reveliotis
Chen Zhou
Douglas A. Bodner
Leon F. McGinnis
Published in:
SMC (2001)
Keyphrases
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high fidelity
real time
surgical simulation
high quality
medical image compression
integrated circuit
semiconductor manufacturing
multimedia
video conferencing
real environment
high resolution
simulation model
rms error
image processing