Development of multi-stage optical variable attenuator system and its control method for wafer inspection system.
Tomoharu NagashimaHisaaki KanaiPublished in: IEICE Electron. Express (2023)
Keyphrases
- multistage
- control method
- production system
- adaptive control
- control algorithm
- control strategy
- control system
- stochastic optimization
- lot sizing
- single stage
- stochastic programming
- dynamic programming
- dc dc converter
- optimal policy
- grey prediction
- fuzzy controller
- fuzzy control
- pid controller
- pid control
- active power filter
- real time
- manufacturing systems
- matlab simulink
- single phase
- fuzzy sets
- machine learning
- neural network