Design and fabrication of an in-plane SOI MEMS accelerometer with a high yield rate.

Pengcheng Li Xiaoying Li Enfu Li Qiang Shen Honglong Chang

Published in: NEMS (2015)

Keyphrases

case study
three dimensional
wide range
website
computer aided
engineering design
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neural network
artificial intelligence
user interface
mobile robot
knowledge based systems
activity recognition
high density