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Reliability of the doping concentration in an ultra-thin body and buried oxide silicon on insulator (SOI) and comparison with a partially depleted SOI.
Wen-Teng Chang
Chun-Ming Lai
Wen-Kuan Yeh
Published in:
Microelectron. Reliab. (2014)
Keyphrases
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silicon on insulator
ibm power processor
cmos technology
high speed