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Fabrication of 3D MEMS toroidal microinductor for high temperature application.

Chong LeiYong ZhouXiao-Yu GaoWen DingYing CaoZhi-Min ZhouHyung Choi
Published in: Microelectron. J. (2006)
Keyphrases
  • high temperature
  • e learning
  • three dimensional
  • multiscale
  • decision support
  • newly developed