A Distributed Supervisor Architecture for a General Wafer Production System.
Fotis N. KoumboulisDimitrios G. FragkoulisPanteleimon GeorgakopoulosPublished in: Sensors (2023)
Keyphrases
- production system
- multiprocessor architecture
- semiconductor manufacturing
- distributed architecture
- distributed systems
- multistage
- special case
- production process
- peer to peer
- certainty factor
- production rules
- end to end
- control structure
- hierarchical architecture
- expert systems
- planning horizon
- mobile agents
- simulation software