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Utilizing Lateral Plate Transducer Modes for High Quality Acoustofluidics in Silicon-Based Chips.

Andreas FuchslugerAnnalisa De PastinaNorbert CselyuszkaNikolai AndrianovAli RoshanghiasTina MitteramskoglerRafael EckerThomas Voglhuber-BrunnmaierMohssen MoridiBernhard Jakoby
Published in: IEEE SENSORS (2022)
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