Login / Signup
Comparison of deposition models for a TEOS LPCVD process.
Stefan Holzer
Alireza Sheikholeslami
Markus Karner
Tibor Grasser
Siegfried Selberherr
Published in:
Microelectron. Reliab. (2007)
Keyphrases
</>
process model
probabilistic model
machine learning
statistical analysis
metamodel
databases
data mining
video sequences
prior knowledge
control system
parameter estimation
statistical model
development process
learned models