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Design, Fabrication, and Dynamic Analysis of a MEMS Ring Resonator Supported by Twin Circular Curve Beams.

Ahmad Rahbar RanjiGnanesh NageshFangyan SunMohammed Jalal Ahamed
Published in: Sensors (2024)
Keyphrases
  • dynamic analysis
  • design process
  • reverse engineering
  • case study
  • static analysis
  • user interface
  • engineering design
  • knowledge base
  • design principles
  • integrated circuit
  • high density