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A 36% Scandium Aluminum Nitride pMUT - FBAR Dual Mode Pressure Sensor for IoT Applications.
Walter Gubinelli
Luca Colombo
Bernard Herrera Soukup
Pietro Simeoni
Blair Kopp
Alberto Corigliano
Cristian Cassella
Matteo Rinaldi
Published in:
SENSORS (2023)
Keyphrases
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sensor web
sensor data
management system
sensor networks
cloud computing
real time
ubiquitous computing
thin film
multi sensor
ontology driven
sensory data
big data
database
vision sensor
data acquisition
smart objects
gate insulator