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Novel partial punch-through-stopper scheme for substrate leakage optimization of nanosheet field-effect transistors.
Huaizhi Luo
Yongliang Li
Fei Zhao
JiaYi Zhang
Yan Li
Published in:
Microelectron. J. (2024)
Keyphrases
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semiconductor devices
optimization scheme
optimization problems
field effect transistors
optimization algorithm
global optimization
schottky barrier
optimization method
optimization process
optimization methods
classification scheme
recognition scheme