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Instantaneous de-embedding of the on-wafer equivalent-circuit parameters of acoustic resonator (FBAR) for integrated circuit applications.

Humberto CampanellaArantxa UrangaPascal NouetPedro De Paco SanchezNúria BarniolJaume Esteve
Published in: SBCCI (2007)
Keyphrases
  • integrated circuit
  • equivalent circuit
  • steady state
  • sensitivity analysis
  • electron beam
  • image segmentation
  • numerical simulations
  • efficient implementation