Multi-Modal Resonance Measurement Capable of Discerning and Visualizing Effects Due to Excitation Schemes in MEMS Resonator.
Bo XuJiankai ZhuTongqiao MiaoJing LiQingyang DengSong WuTing WenFei WangXiaoping HuXuezhong WuDingbang XiaoZenghui WangPublished in: NEMS (2021)