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Self-aligned double patterning decomposition for overlay minimization and hot spot detection.
Hongbo Zhang
Yuelin Du
Martin D. F. Wong
Rasit Onur Topaloglu
Published in:
DAC (2011)
Keyphrases
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hot spots
detection algorithm
false alarms
location prediction
databases
object detection
detection method
detection rate
overlay network
point processes
data mining
anomaly detection
automatic detection
detection accuracy
decomposition method