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Adaptive iterative extended state observer-based data-driven iterative learning model predictive control for semiconductor silicon single crystal batch process.

Jun-Chao RenDing LiuYin Wan
Published in: J. Frankl. Inst. (2023)
Keyphrases
  • data driven
  • iterative learning
  • model predictive control
  • real time
  • data sets
  • multi class
  • benchmark datasets
  • predictive control
  • iterative learning control