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Measurement and Characterization of Nano-Electro-Mechanical Systems Using Laser Interferometry.
Valentina Bello
Atakan B. Ari
M. Selim Hanay
Kamil L. Ekinci
Published in:
I2MTC (2020)
Keyphrases
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electro mechanical systems
fiber optic
real time
data acquisition
artificial intelligence
wireless sensor networks
probabilistic model
nano scale
genetic algorithm
learning algorithm
three dimensional
expert systems
high frequency
phase unwrapping
laser beam