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EUV and e-beam manufacturability: challenges and solutions.

Yao-Wen ChangRu-Gun LiuShao-Yun Fang
Published in: DAC (2015)
Keyphrases
  • lessons learned
  • key issues
  • application scenarios
  • real world
  • optimal solution
  • specific problems
  • open issues
  • computational issues
  • special case
  • multi objective
  • np hard
  • cross section