Critical dimension control in photolithography based on the yield by a simulation program.

H.-Y. Kang A. H. I. Lee

Published in: Microelectron. Reliab. (2006)

Keyphrases

control program
control system
control strategy
simulation model
mathematical model
control theory
control problems
robot control
matlab simulink
control strategies
control method
temporal dimension
automatic programming
simulation study
dynamic characteristics
data acquisition
flight test
pwm rectifier