Fast Transistor Threshold Voltage Measurement Method for High-Speed, High-Accuracy Advanced Process Characterization.
Tseng-Chin LuoMango Chia-Tso ChaoHuan-Chi TsengMasaharu GotoPhilip A. FisherYuan-Yao ChangChi-Min ChangTakayuki TakaoKatsuhito IwasakiCheng Mao LeePublished in: IEEE Trans. Very Large Scale Integr. Syst. (2014)
Keyphrases
- high accuracy
- high speed
- high precision
- highly accurate
- significant improvement
- preprocessing
- classification method
- detection method
- optimization method
- threshold values
- objective function
- dynamic programming
- synthetic data
- classification process
- training process
- clustering method
- diffusion process
- recognition process
- rapid convergence
- neural network
- optimization algorithm
- computational cost
- prior knowledge
- similarity measure
- feature extraction
- genetic algorithm