Interfacial-Layer Design for Hf1-xZrxO2-Based FTJ Devices: From Atom to Array.
H.-L. ChiangJ.-F. WangK.-H. LinC.-H. NienJ.-J. WuK.-Y. HsiangC.-P. ChuuY.-W. ChenX. W. ZhangC. W. LiuTahui WangC. C. WangM.-H. LeeM.-F. ChangC.-S. ChangT. C. ChenPublished in: VLSI Technology and Circuits (2022)