A novel method for the manufacture of MEMS devices with large exposed area based on SOI wafers.
Jianbing XieWeizheng YuanHonglong ChangPublished in: NEMS (2009)
Keyphrases
- matching algorithm
- similarity measure
- fully automatic
- classification method
- synthetic data
- cost function
- experimental evaluation
- computational cost
- detection algorithm
- clustering method
- high precision
- genetic algorithm
- support vector machine
- high accuracy
- edge detection
- input data
- theoretical analysis
- segmentation algorithm
- significant improvement
- mobile devices
- computational complexity