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Design driven patterning optimizations for low K1 lithography.
Kanak B. Agarwal
Shayak Banerjee
Published in:
ICICDT (2012)
Keyphrases
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design process
design principles
social networks
case study
relational databases
design issues
computer aided
data driven
machine learning
expert systems
data sets
multiresolution
feature selection
information systems
artificial intelligence
conceptual model
information retrieval
design decisions