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A Rapid Prototyping of Real-Time Pattern Generator for Step-and-Scan Lithography Using Digital Micromirror Device.
Naoto Miyamoto
Masahiko Shimakage
Tatsuo Morimoto
Kazuya Kadota
Shigetoshi Sugawa
Tadahiro Ohmi
Published in:
FPT (2007)
Keyphrases
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rapid prototyping
real time
pattern generator
smart spaces
development environment
data acquisition
artificial intelligence
agent oriented programming
case study
medical devices
set top box
low cost
mobile devices
ubiquitous computing
humanoid robot
website
code generation
data conversion
visual programming