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films deposited by ultrasonic spray pyrolysis and atomic layer deposition methods for passivation of 4H-SiC devices.

Maciej WolborskiMietek BakowskiArmando OrtizViljami PoreAdolf SchönerMikko RitalaMarkku LeskeläAnders Hallén
Published in: Microelectron. Reliab. (2006)
Keyphrases
  • significant improvement
  • machine learning methods
  • electrical properties
  • data mining
  • genetic algorithm
  • three dimensional
  • preprocessing
  • probabilistic model
  • high dimensional data
  • classification method