Impact of Si/Al implantation on the forming voltage and pre-forming conduction modes in HfO2 based OxRAM cells.

M. Barlas Boubacar Traore Laurent Grenouillet Stefania Bernasconi Philippe Blaise Mouhamad Alayan Benoid Sklenard Eric Jalaguier Philippe Rodriguez F. Mazen E. Vilain M. Guillermet Simon Jeannot Elisa Vianello Luca Perniola

Published in: ESSDERC (2016)

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