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A GHz Silicon-Based Width Extensional Mode MEMS Resonator with Q over 10, 000.

Wenli LiuYujie LuZeji ChenQianqian JiaJunyuan ZhaoBo NiuWei WangYalu HaoYinfang ZhuJinling YangFuhua Yang
Published in: Sensors (2023)
Keyphrases
  • high speed
  • low cost
  • high density
  • database
  • genetic algorithm
  • image processing
  • multiscale
  • frequency band