The method of prevent footing effect in making SOI micro-mechanical structure.
Xu MaoZhenchuan YangZhihong LiGuizhen YanPublished in: NEMS (2009)
Keyphrases
- significant improvement
- detection method
- preprocessing
- neural network
- theoretical analysis
- high accuracy
- computational complexity
- fully automatic
- data structure
- pairwise
- artificial neural networks
- bayesian networks
- probabilistic model
- image sequences
- edge detection
- mutual information
- image processing
- optimization algorithm
- data sets
- classification method