Automatic model verification for semiconductor manufacturing simulation.
Boon-Ping GanPeter LendermannWolfgang SchollMarcin MosinskiPatrick PreussPublished in: WSC (2013)
Keyphrases
- simulation model
- mathematical model
- analytical model
- simulation study
- theoretical framework
- probabilistic model
- computational model
- simulation data
- discrete event
- real time
- management system
- prior knowledge
- high level
- hidden markov models
- cost function
- statistical model
- experimental data
- fully automatic
- conceptual model
- multi agent systems
- multi agent
- artificial intelligence
- data sets