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O heteroepitaxial layers using a nanoscratch technique.

Yu-Ming ChangHua-Chiang WenChu-Shou YangDerming LianChien-Huang TsaiJyh-Shyang WangWen-Fa WuChang-Pin Chou
Published in: Microelectron. Reliab. (2010)
Keyphrases
  • multi layer
  • single layer
  • multiple layers
  • digital libraries
  • objective function
  • support vector
  • preprocessing