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Development and Proof of Concept of a Miniaturized MEMS Quantum Tunneling Accelerometer Based on PtC Tips by Focused Ion Beam 3D Nano-Patterning.

Michael HaubMartin BognerThomas GüntherAndré ZimmermannHermann Sandmaier
Published in: Sensors (2021)
Keyphrases
  • case study
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  • software engineering
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  • rapid development
  • cross section