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AFM Microcantilever with On-chip Electrothermal and Piezoelectric Transducers: Z-axis Control and Standalone Operation.

Hazhir Mahmoodi NasrabadiNastaran NikooienejadK. S. VikrantS. O. Reza Moheimani
Published in: AIM (2023)
Keyphrases
  • low cost
  • neural network
  • control system
  • high speed
  • high density
  • data sets
  • information systems
  • signal processing
  • control strategy
  • robotic systems
  • control method
  • process control
  • control theory
  • circuit design