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One-step patterning of a flexible piezoresistive MEMS sensor by 3D direct laser writing.
Georges Dubourg
Cedo Zlebic
Jovan Matovic
Vesna Crnojevic-Bengin
Published in:
NEMS (2015)
Keyphrases
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laser scanner
range sensors
sensor networks
post processing
real time
sensor data
multi sensor
magneto optic
evolutionary algorithm
high sensitivity
control loop
particle image velocimetry