Integration of CNT in TSV (≤5 μm) for 3D IC application and its process challenges.

Kaushik Ghosh C. C. Yap Beng Kang Tay Chuan Seng Tan

Published in: 3DIC (2013)

Keyphrases

neural network
information integration
databases
technical solutions
information retrieval
decision making
metadata
case study
similarity measure
data structure
expert systems
domain knowledge
knowledge discovery
data integration
lessons learned
diffusion process