Interpretable Anomaly Detection for Knowledge Discovery in Semiconductor Manufacturing.
Mattia CarlettiMarco MaggipintoAlessandro BeghiGian Antonio SustoNatalie GentnerYao YangAndreas KyekPublished in: WSC (2020)
Keyphrases
- anomaly detection
- semiconductor manufacturing
- knowledge discovery
- intrusion detection
- process control
- anomalous behavior
- network intrusion detection
- detecting anomalies
- data mining
- production system
- unsupervised anomaly detection
- network traffic
- computer security
- behavior analysis
- databases
- association rules
- data mining algorithms
- text mining
- network security
- data analysis
- data mining techniques
- network anomaly detection
- outlier detection
- network intrusion
- intrusion detection system
- detecting anomalous
- unsupervised learning
- negative selection algorithm
- machine learning
- malware detection
- real time
- detect anomalies
- information retrieval
- real world
- dimensionality reduction
- pattern recognition
- misuse detection