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A Novel Methodology to Predict Process-Induced Warpage in Advanced BEOL Interconnects.
Y. H. Lin
C. C. Lee
C. Y. Liao
M. H. Lin
W. C. Tu
Robin Chen
H. P. Chen
Winston S. Shue
Min Cao
Published in:
IRPS (2023)
Keyphrases
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process model
multiscale
expert systems
input output
databases
artificial intelligence
three dimensional
relational databases
evolutionary algorithm
domain knowledge