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Full custom MEMS design: A new method for the analysis of motion-dependent parasitics.

Axel HaldPekka HerzogenrathJürgen ScheibleJens LienigJohannes SeelhorstPeter Brandl
Published in: Integr. (2018)
Keyphrases
  • significant improvement
  • high accuracy
  • preprocessing
  • clustering method
  • detection method
  • probabilistic model
  • particle filter
  • missing data
  • cost function
  • segmentation algorithm
  • fully automatic
  • production system