Experimental method and FE simulation model for evaluation of wafer probing parameters.

D. S. Liu M. K. Shih

Published in: Microelectron. J. (2006)

Keyphrases

simulation model
evaluation method
cost function
high accuracy
mathematical model
sensitivity analysis
objective function
model selection
parameter estimation
gold standard
similarity measure
support vector machine
clustering method
detection method
simulation environment
analytical model