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Scratch-concerned yield modeling for IC manufacturing involved with a chemical mechanical polishing process.
Jiao-jiao Zhu
Xiao-hua Luo
Li-sheng Chen
Yi Ye
Xiaolang Yan
Published in:
J. Zhejiang Univ. Sci. C (2012)
Keyphrases
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manufacturing processes
database
quality control
production process
neural network
artificial intelligence
social networks
artificial neural networks
hidden markov models
petri net
process model
conceptual model
product quality
mechanical design