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Toward Improvement and Evaluation of Reconstruction Capability of CapsNet-Based Wafer Map Defect Pattern Classifier.
Yuki Yamanaka
Masayuki Arai
Yoshikazu Nagamura
Satoshi Fukumoto
Published in:
ITC-Asia (2023)
Keyphrases
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three dimensional
evaluation method
database
evaluation model
reconstruction method
defect detection
gold standard
semiconductor manufacturing
maximum a posteriori probability