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Electron beam induced carbon deposition using hydrocarbon contamination for XTEM analysis.
J. S. Luo
C. S. Sung
W. S. Hsu
L. Y. Huang
J. D. Russell
Published in:
Microelectron. Reliab. (2010)
Keyphrases
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electron beam
three dimensional
data analysis
integrated circuit
case study
image analysis
thin film
mathematical analysis