Defect diagnosis using in line product control data in semiconductor industry.
Mohamad ChakarounMohand DjeziriMustapha OuladsineJacques PinatonPublished in: ICSC (2015)
Keyphrases
- database
- synthetic data
- data collection
- data sets
- data acquisition
- small number
- image data
- databases
- probability distribution
- data processing
- control system
- data structure
- training data
- data mining techniques
- data distribution
- spatial data
- computer systems
- data quality
- original data
- sensor data
- neural network
- case study
- input data
- knowledge discovery
- data sources
- mobile robot