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Scheduling dual-arm cluster tools with multiple wafer types and residency time constraints.
Jipeng Wang
Hesuan Hu
Chunrong Pan
Yuan Zhou
Liang Li
Published in:
IEEE CAA J. Autom. Sinica (2020)
Keyphrases
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resource constraints
wafer fabrication
software tools
constrained optimization
data points
scheduling problem
co occurrence
response time
decision support
user friendly
integrated circuit