Finite-element analysis of semiconductor devices: The FIELDAY program.

Edward M. Buturla P. E. Cottrell B. M. Grossman K. A. Salsburg

Published in: IBM J. Res. Dev. (2000)

Keyphrases

semiconductor devices
finite element analysis
finite element
electron beam
computer aided design
using artificial neural networks
finite element model
material properties
field effect transistors
friction coefficient
stress distribution
experimental data
database
high accuracy
spatially varying