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Planar copper-tin inter-metallic film formation on strained substrates.
Feng-Chih Hsu
Ya-Chi Cheng
Yu-Ting Wang
Ming-Tzer Lin
Chih-Ming Chen
Published in:
Microelectron. Reliab. (2014)
Keyphrases
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thin film
film thickness
magnetic recording
high density
printed circuit boards
room temperature
data sets
multi layer
ground plane
dual channel
search engine
integrated circuit
case study
x ray
planar surfaces
single point