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Advanced secondary resource control in semiconductor lithography areas: From theory to practice.
Dirk Doleschal
Gerald Weigert
Andreas Klemmt
Frank Lehmann
Published in:
WSC (2013)
Keyphrases
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control theory
control system
theoretical framework
resource allocation
resource management
control method
theoretical basis
formal theory
data mining
machine learning
artificial intelligence
theoretical foundation
optimal control
adaptive control
topics covered include
theoretical insights