Fault classification and timing prediction based on shipment inspection data and maintenance reports for semiconductor manufacturing equipment.
Euisuk ChungKyoungchan ParkPilsung KangPublished in: Comput. Ind. Eng. (2023)
Keyphrases
- data sets
- data collection
- data sources
- semiconductor manufacturing
- database
- data points
- support vector
- data structure
- training data
- data analysis
- data quality
- raw data
- missing values
- decision trees
- data processing
- data mining techniques
- training set
- knowledge discovery
- feature extraction
- prediction accuracy
- spatial data
- feature vectors
- feature space
- prediction model
- historical data
- machine learning
- normal operation