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Kyoungchan Park
Publication Activity (10 Years)
Years Active: 2023-2023
Publications (10 Years): 1
Top Topics
Historical Data
Normal Operation
Support Vector
Prediction Accuracy
Top Venues
Comput. Ind. Eng.
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Publications
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Euisuk Chung
,
Kyoungchan Park
,
Pilsung Kang
Fault classification and timing prediction based on shipment inspection data and maintenance reports for semiconductor manufacturing equipment.
Comput. Ind. Eng.
176 (2023)